Title :
Various Fatigue Testing of Polysilicon Microcantilever Beam in Bending
Author :
Hocheng, Hong ; Hung, Jeng-Nan
Author_Institution :
Nat. Tsing Hua Univ., Hsinchu
Abstract :
In this study, the polysilicon microcantilever beams are successfully fabricated and fully suspended. The results of fatigue life in bending are obtained by both microactuator testing method, MTS testing machine and piezoelectric system. The experimental data shows that the larger stress reduces the fatigue life.
Keywords :
bending; cantilevers; fatigue; microactuators; silicon; Si; bending; fatigue life; microactuator testing method; piezoelectric system; polysilicon microcantilever beams; Fatigue; Life testing; Materials testing; Microactuators; Passivation; Piezoelectric films; Silicon; Stress; System testing; Wet etching;
Conference_Titel :
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location :
Kyoto
Print_ISBN :
978-4-9902472-4-9
DOI :
10.1109/IMNC.2007.4456251
