Title :
Helical Patterning onto Fine Pipes and Fabrication of Long-span Micro-coils
Author :
Katayama, Masahiro ; Horiuchi, Toshiyuki
Author_Institution :
Tokyo Denki Univ., Tokyo
Abstract :
In this research, 3-dimensional laser scan patterning onto extremely fine pipes is investigated and minute micro-coils are fabricated by etching the helically patterned fine pipes.
Keywords :
coils; copper; etching; laser materials processing; micromechanical devices; photolithography; pipes; 3D laser scan patterning; Cu; etching; fine copper pipes; helical patterning; microcoils; optical lithography; Coatings; Coils; Copper; Etching; Laser beams; Lenses; Lithography; Optical device fabrication; Resists; Temperature control;
Conference_Titel :
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location :
Kyoto
Print_ISBN :
978-4-9902472-4-9
DOI :
10.1109/IMNC.2007.4456259
