DocumentCode
3050423
Title
Fabrication of pitch-variable MEMS gratings using thermal and electrostatic actuators
Author
Kanamori, Y. ; Kobayashi, T. ; Hane, K.
Author_Institution
Tohoku Univ., Sendai
fYear
2007
fDate
5-8 Nov. 2007
Firstpage
380
Lastpage
381
Abstract
This study has fabricated a thermal-driven analog-modulated grating and an electrostatic-driven digital-modulated grating. When the grating period was changed from 4 to 8 mum, approximately 4.2deg of the diffraction angle changing was observed.
Keywords
diffraction gratings; electrostatic actuators; light diffraction; micro-optomechanical devices; optical fabrication; MEMS gratings; diffraction angle; digital-modulated grating; distance 4 mum to 8 mum; electrostatic actuators; electrostatic-driven grating; pitch-variable gratings; thermal actuators; thermal-driven grating; Diffraction gratings; Electrodes; Electrons; Electrostatic actuators; Etching; Fabrication; Microactuators; Micromechanical devices; Optical modulation; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location
Kyoto
Print_ISBN
978-4-9902472-4-9
Type
conf
DOI
10.1109/IMNC.2007.4456263
Filename
4456263
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