Title :
Fabrication of pitch-variable MEMS gratings using thermal and electrostatic actuators
Author :
Kanamori, Y. ; Kobayashi, T. ; Hane, K.
Author_Institution :
Tohoku Univ., Sendai
Abstract :
This study has fabricated a thermal-driven analog-modulated grating and an electrostatic-driven digital-modulated grating. When the grating period was changed from 4 to 8 mum, approximately 4.2deg of the diffraction angle changing was observed.
Keywords :
diffraction gratings; electrostatic actuators; light diffraction; micro-optomechanical devices; optical fabrication; MEMS gratings; diffraction angle; digital-modulated grating; distance 4 mum to 8 mum; electrostatic actuators; electrostatic-driven grating; pitch-variable gratings; thermal actuators; thermal-driven grating; Diffraction gratings; Electrodes; Electrons; Electrostatic actuators; Etching; Fabrication; Microactuators; Micromechanical devices; Optical modulation; Silicon;
Conference_Titel :
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location :
Kyoto
Print_ISBN :
978-4-9902472-4-9
DOI :
10.1109/IMNC.2007.4456263
