Title :
Spot size converter with vertically tapered waveguide core fabricated by sputter etching
Author :
Kitano, N. ; Komano, H. ; Ishikawa, H. ; Maru, K. ; Tanaka, K. ; Kashimura, S. ; Mimura, H.
Author_Institution :
Hitachi-cable, Ltd., Ibaraki
Abstract :
This paper demonstrates novel spot size converters (SSCs) with vertical taper, which is fabricated by simple processes based on sputter etching. The relationship between pressure condition of sputter etching and base angle of core cross-section is shown. With these investigations, coupling losses between SSCs and single mode fibers can be reduced to about 0.3 dB.
Keywords :
optical fabrication; optical losses; optical waveguides; sputter etching; coupling losses; single mode fibers; spot size converter; sputter etching; vertical taper; waveguide core; Argon; Atmosphere; Chemical vapor deposition; Coupling circuits; Fabrication; Integrated circuit technology; Lithography; Optical fiber polarization; Silicon compounds; Sputter etching;
Conference_Titel :
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location :
Kyoto
Print_ISBN :
978-4-9902472-4-9
DOI :
10.1109/IMNC.2007.4456264
