DocumentCode
3050435
Title
Spot size converter with vertically tapered waveguide core fabricated by sputter etching
Author
Kitano, N. ; Komano, H. ; Ishikawa, H. ; Maru, K. ; Tanaka, K. ; Kashimura, S. ; Mimura, H.
Author_Institution
Hitachi-cable, Ltd., Ibaraki
fYear
2007
fDate
5-8 Nov. 2007
Firstpage
382
Lastpage
383
Abstract
This paper demonstrates novel spot size converters (SSCs) with vertical taper, which is fabricated by simple processes based on sputter etching. The relationship between pressure condition of sputter etching and base angle of core cross-section is shown. With these investigations, coupling losses between SSCs and single mode fibers can be reduced to about 0.3 dB.
Keywords
optical fabrication; optical losses; optical waveguides; sputter etching; coupling losses; single mode fibers; spot size converter; sputter etching; vertical taper; waveguide core; Argon; Atmosphere; Chemical vapor deposition; Coupling circuits; Fabrication; Integrated circuit technology; Lithography; Optical fiber polarization; Silicon compounds; Sputter etching;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location
Kyoto
Print_ISBN
978-4-9902472-4-9
Type
conf
DOI
10.1109/IMNC.2007.4456264
Filename
4456264
Link To Document