Title :
Novel forming for fabrication of micro V-cut grooves using the optical-element
Author :
Huang, Ying-Jui ; Chang, Tien-Li ; Chou, Hwai-Pwu ; Chang, Fuh-Yu ; Lin, Cheng-Hsuan
Author_Institution :
Nat. Tsing Hua Univ., Hsinchu
Abstract :
This paper presents a novel photolithography fabrication process for building V-cut grooves utilizing controlled light source refraction. This fabrication method is an important platform for next-generation information displays.
Keywords :
display instrumentation; light refraction; light sources; photolithography; controlled light source refraction; fabrication process; information displays; microV-cut grooves; optical-element; photolithography; Brightness; Light sources; Liquid crystal displays; Lithography; Machining; Microstructure; Optical device fabrication; Optical films; Optical refraction; Silicon;
Conference_Titel :
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location :
Kyoto
Print_ISBN :
978-4-9902472-4-9
DOI :
10.1109/IMNC.2007.4456267
