An automated design flow for MEMS accelerometers with Sigma-Delta control

This contribution presents a novel methodology for automated optimal design of MEMS accelerometers embedded in electronic control circuitry from user defined high-level performance specifications and design constraints. The proposed approach is based on simulation-based optimisation where automated configuration selection for electronic blocks and synthesis of mechanical layouts are coupled with calculations of optimal design parameters. The underlying dedicated MEMS simulator supports distributed mechanical dynamics to enable accurate performance prediction of critical mechanical components, such as acceleration sensing elements which form an essential part of the mixed-technology control loop.