Reversal Nanoimprint for Three Dimensional Fluidic Biosystems

Nanotechnology can be applied to fabricate three-dimensional (3D) fluidic channels and microsystems for biomedical applications such as DNA analysis. The ability to fabricate 3D nanostructures allows new designs to be developed and integration of complex biomedical systems. Conventional semiconductor fabrication processes for 3D structures involve multiple and costly process steps such as deposition, planarization, lithography, and etching. In contrast, reversal nanoimprint has the unique capability of building 3D nanochannels in integrated fluidic system with simpler technology and better control. Combining UV exposure with reversal nanoimprint, low temperature and low pressure can be used to pattern arrays of nanochannel network over a large area. In this review, examples of reversal UV nanoimprint technology for 3D fluidic system will be demonstrated. In addition, control of DNA placement and stretching in the nanochannels will be shown.