Title :
Continuous 2-Sided Roll to Roll Nanopatterning of a Polymer Film
Author :
Mäkelä, T. ; Lambertini, V. ; Haatainen, T. ; Majander, P. ; Ahopelto, J.
Author_Institution :
VTT Micro & Nanoelectron., Espoo
Abstract :
We report a concept of producing nanosize structures on the cellulose acetate film by using a continuous (roll to roll) NIL method. We show structures were both sides of the polymer film are imprinted at the same time, in one imprint cycle. In the process only the surface of the polymer film is softened during the process. The results are compared to one sided roll to roll imprinting. The imprint time for a 1 mm structure was ca. 0.005 s which is very short when compared to the average imprint time used in wafer scale thermal NIL. Aligning possibilities of the printed structures are discussed. Roll to roll imprinted structures are analyzed using optical microscopy and AFM.
Keywords :
atomic force microscopy; nanopatterning; optical microscopy; polymer films; rolling; AFM; cellulose acetate film; nanosize structures; optical microscopy; polymer film; roll imprinting; Light emitting diodes; Manufacturing; Nanopatterning; Optical films; Optical microscopy; Optical polymers; Polymer films; Resistance heating; Substrates; Temperature;
Conference_Titel :
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location :
Kyoto
Print_ISBN :
978-4-9902472-4-9
DOI :
10.1109/IMNC.2007.4456286