Title :
Evaluation of deteriorated anti-stiction layer in NIL
Author :
Ishihara, J. ; Koszewski, A. ; Kayama, M. ; Kawata, H. ; Rymuza, Z. ; Hirai, Y.
Author_Institution :
Osaka Pref. Univ., Osaka
Abstract :
Mold releasing is one of the important issues in nanoimprint lithography (NIL). In this paper, de-molding force and friction coefficients for deteriorated surface statuses are quantitatively investigated to evaluate the surface quality of the mold. The mold surface is successfully deteriorated by UV irradiation as a durability inspection. The de-molding force and the friction coefficient are strongly depend on the contact angle of the mold surface. These results quantitative evaluation of the de-molding process and propose durability inspection method for anti-stiction layer.
Keywords :
contact angle; friction; moulding; nanolithography; silicon; soft lithography; stiction; ultraviolet radiation effects; NIL; Si; UV irradiation; antistiction layer; contact angle; de-molding force; friction coefficient; mold surface; molding force; nanoimprint lithography; surface statuses; Atomic force microscopy; Atomic measurements; Force measurement; Friction; Inspection; Nanolithography; Photonics; Physics; Resists; Surface treatment;
Conference_Titel :
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location :
Kyoto
Print_ISBN :
978-4-9902472-4-9
DOI :
10.1109/IMNC.2007.4456298
