Fabrication of ultra smooth mirrors by UV-nanoimprint

In order to evaluate the spectrum with regard to a typical optical substrate, a dielectric layer is simultaneously deposited on the mechanically polished BK7 substrate and the UV-nanoimprinted substrate by ion beam scattering. This study shows that the transmittance spectrum of the dielectric multilayer mirrors on the nanoimprinted substrate and the mechanically polished BK7 substrate. The transmittance of the mirror on the UV-nanoimprinted polymer is 0.0001% at the wavelength of 633 nm, which is comparable to that of the mirror on the BK7 substrate.