DocumentCode :
3051224
Title :
In-situ visualization of local fields at a sharp tungsten emitter using low-voltage scanning transmission electron microscope
Author :
Fujita, Jun-ichi ; Ikeda, Yuta ; Ichihasi, Toshinari ; Matsui, Shinji
Author_Institution :
Japan Sci. & Technol. Co., Saitama
fYear :
2007
fDate :
5-8 Nov. 2007
Firstpage :
466
Lastpage :
467
Abstract :
In this paper, we demonstrate that the local electric field distribution at a sharp tip can be drawn as a contour map and it agrees well with numerical calculations based on finite element method (FEM). In the Rutherford scattering scheme, when the primary electron beam passes close to the tip apex, it is strongly deflected toward the anode by the local field and is interrupted at the orifice edge. Thus, the interruption generates a circular dark shadow in the STEM image (see Fig. 1(b)). In contrast, an electron beam scanned far from the tip apex is slightly deflected, and also reaches the orifice edge, producing the actual orifice shape, as shown in Fig. 2(a). Here, we define the impact factor b as the distance between the shadow boundary and the tip apex, and the deflection angle as the angle between those two electron-beam trajectories.
Keywords :
Rutherford backscattering; electric fields; electron beams; finite element analysis; numerical analysis; scanning-transmission electron microscopy; tungsten; circular dark shadow; contour map; deflection angle; electron-beam trajectories; finite element method; local electric field distribution; numerical calculations; orifice edge; scanning transmission electron microscopy; sharp tungsten emitter; Anodes; Data visualization; Electron beams; Electron emission; Finite element methods; Orifices; Scanning electron microscopy; Scattering; Transmission electron microscopy; Tungsten;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location :
Kyoto
Print_ISBN :
978-4-9902472-4-9
Type :
conf
DOI :
10.1109/IMNC.2007.4456306
Filename :
4456306
Link To Document :
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