Title :
Fabrication of bottom-up gas sensors based on individual SnO2 nanowires and suspended microhotplates
Author :
Barth, Stephan ; Hernandez-Ramirez, F. ; Prades, J.D. ; Jimenez-Diaz, R. ; Casals, O. ; Tarancon, A. ; Juli, M.A. ; Mathur, S. ; Helwig, Andreas ; Spannhake, J. ; Miiller, G.
Author_Institution :
Barcelona Univ., Barcelona
Abstract :
In this work, bottom-up devices based on individual monocrystalline SnO2 nanowires (NWs) were fabricated using FIB nanolithography on top of suspended microhotplates, with integrated heater and interdigitated microelectrodes. The electrical characterisation of such devices in the presence of different gases show that devices with improved gas sensing properties can be fabricated.
Keywords :
focused ion beam technology; gas sensors; nanoelectronics; nanolithography; nanowires; semiconductor materials; tin compounds; FIB nanolithography; SnO2; bottom-up gas sensors; integrated heater; interdigitated microelectrodes; nanowires; suspended microhotplates; Chemicals; Circuit testing; Contacts; Fabrication; Gas detectors; Microelectrodes; Nanolithography; Nanowires; Platinum; Thin film sensors;
Conference_Titel :
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location :
Kyoto
Print_ISBN :
978-4-9902472-4-9
DOI :
10.1109/IMNC.2007.4456318
