DocumentCode :
3051521
Title :
Cantilever Fabrication by Force Free Release Transfer Process
Author :
Kawata, H. ; Ryugou, K. ; Ohta, S. ; Yasuda, M. ; Hirai, Y.
Author_Institution :
Osaka Prefecture Univ., Sakai
fYear :
2007
fDate :
5-8 Nov. 2007
Firstpage :
504
Lastpage :
505
Keywords :
adhesives; crystal microstructure; electroplating; micromechanical devices; nanolithography; nanoparticles; nanotechnology; nickel; photolithography; polymer films; spin coating; titanium compounds; ultraviolet radiation effects; JkJk-TiO2-SiO2; MEMS fabrication; Ni; PMMA film; SiO2; adhesion; adhesive layer; film thickness; force free release transfer process; microstructures; nanopowder; nickel cantilever fabrication; nickel electroplating; photolithography; quartz substrate; silicon substrate; size 4 mum; spin coatings; spray method; temperature 190 C; time 15 min; Adhesives; Bonding forces; Cities and towns; Fabrication; Micromechanical devices; Microstructure; Nickel; Spraying; Structural beams; Substrates;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location :
Kyoto, Japan
Print_ISBN :
978-4-9902472-4-9
Type :
conf
DOI :
10.1109/IMNC.2007.4456325
Filename :
4456325
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3051521
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