Title :
Fabrication of the functional 3-D micromesh structures coated with TiO2 particles and biocatalyst
Author :
Keino, Satoshi ; Matsumura, Hirokazu ; Ishioka, Masao ; Sato, Hironobu ; Shoji, Shuichi
Author_Institution :
Waseda Univ., Tokyo
Abstract :
This paper presents the fabrication method of the functional 3-D micromesh structures coated with TiO2 particles and biocatalyst for high efficient microreactors. The micromesh structures are useful as a micro reaction space because of their large surface area. The TiO2-fixed SU-8 micromesh structures were formed by coating the SU-8/TiO2 mixture on the surface of the SU-8 micromeshes. The biocatalyst-immobilized micromeshes were also formed by coating the biocatalyst/polymer mixture using UV irradiation through the concentric circle patterns.
Keywords :
catalysts; enzymes; microreactors; molecular biophysics; polymer films; spin coating; titanium compounds; ultraviolet radiation effects; SU-8 micromesh; TiO2; UV irradiation; biocatalyst-immobilized micromeshes; biocatalyst-polymer mixture coating; concentric circle patterns; enzyme; functional 3-D micromesh structures; microreaction space; microreactors; spin coating; titanium dioxide particles; Actuators; Biochemistry; Biosensors; Chromium; Coatings; Fabrication; Glass; Microfluidics; Polymer films; Temperature;
Conference_Titel :
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location :
Kyoto
Print_ISBN :
978-4-9902472-4-9
DOI :
10.1109/IMNC.2007.4456333
