Title :
CMOS integrated nanomechanical mass sensors: determination of evaporation rate of femtoliter droplets
Author :
Arcamone, J. ; Ondarcuhu, T. ; Dujardin, E. ; Rius, G. ; Pérez-Murano, F.
Author_Institution :
CNM-IMB (CSIC), Bellaterra
Abstract :
The use of CMOS integrated nanomechanical resonators to determine with high precision the change in mass of liquid droplets with time is presented. The evaporation of droplets with diameters in the one micron range, what corresponds to volumes of femtoliters, nine orders of magnitude smaller than previously published data is studied.
Keywords :
CMOS integrated circuits; drops; evaporation; mass measurement; microsensors; nanotechnology; resonators; CMOS integrated nanomechanical mass sensors; CMOS integrated nanomechanical resonators; droplet mass; evaporation; femtoliter droplets; Lithography; Nanofluidics; Optical resonators; Parasitic capacitance; RLC circuits; Resonance; Semiconductor device modeling; Signal resolution; Silicon compounds; Ultrafast optics;
Conference_Titel :
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location :
Kyoto
Print_ISBN :
978-4-9902472-4-9
DOI :
10.1109/IMNC.2007.4456334
