DocumentCode
3051713
Title
CMOS integrated nanomechanical mass sensors: determination of evaporation rate of femtoliter droplets
Author
Arcamone, J. ; Ondarcuhu, T. ; Dujardin, E. ; Rius, G. ; Pérez-Murano, F.
Author_Institution
CNM-IMB (CSIC), Bellaterra
fYear
2007
fDate
5-8 Nov. 2007
Firstpage
522
Lastpage
523
Abstract
The use of CMOS integrated nanomechanical resonators to determine with high precision the change in mass of liquid droplets with time is presented. The evaporation of droplets with diameters in the one micron range, what corresponds to volumes of femtoliters, nine orders of magnitude smaller than previously published data is studied.
Keywords
CMOS integrated circuits; drops; evaporation; mass measurement; microsensors; nanotechnology; resonators; CMOS integrated nanomechanical mass sensors; CMOS integrated nanomechanical resonators; droplet mass; evaporation; femtoliter droplets; Lithography; Nanofluidics; Optical resonators; Parasitic capacitance; RLC circuits; Resonance; Semiconductor device modeling; Signal resolution; Silicon compounds; Ultrafast optics;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location
Kyoto
Print_ISBN
978-4-9902472-4-9
Type
conf
DOI
10.1109/IMNC.2007.4456334
Filename
4456334
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