Title :
Design of Low-Driving-Voltage Integrated MEMS Switch with Sticking Suppression
Author :
Maeda, Kazuya ; Suzuki, Kenichiro
Author_Institution :
Ritsumeikan Univ., Shiga
Abstract :
Newly-designed MEMS switch can be operated by a low driving-voltage (3.1 V). More interestingly, it can be integrated on a silicon substrate, because the overall structure is formed from metal. These features are suitable for the application of mobile equipment and reconfigurable antennas, etc.
Keywords :
microswitches; driving-voltage; low-driving-voltage integrated MEMS switch; mobile equipment; Adhesives; Contacts; Electrodes; Insertion loss; Microswitches; Platinum; Radio frequency; Springs; Switches; Voltage;
Conference_Titel :
Microprocesses and Nanotechnology, 2007 Digest of papers
Conference_Location :
Kyoto
Print_ISBN :
978-4-9902472-4-9
DOI :
10.1109/IMNC.2007.4456335
