Title :
Modeling bias temperature instability during stress and recovery
Author :
Grasser, Tibor ; Goes, Wolfgang ; Kaczer, Ben
Author_Institution :
Christian Doppler Lab. for TCAD, Tech. Univ. Wien, Vienna
Abstract :
Bias temperature instability has attracted a lot of attention as a dominant degradation mechanism in modern MOS transistors. Despite considerable effort, the exact physics behind this mechanisms are still controversial. We discuss some numerical aspects of our recently presented model which is capable of reproducing the main features of the phenomenon. Furthermore, we demonstrate how the model can be applied to understand variations in nominally identically stressed devices which have become important in the small area limit.
Keywords :
MOSFET; semiconductor device reliability; MOSFET; bias temperature instability; duty-factor; pMOS transistors; recovery; reliability; stressed devices; Degradation; Interface states; Laboratories; MOSFETs; Predictive models; Scalability; Stress; Temperature; Threshold voltage; Time measurement;
Conference_Titel :
Simulation of Semiconductor Processes and Devices, 2008. SISPAD 2008. International Conference on
Conference_Location :
Hakone
Print_ISBN :
978-1-4244-1753-7
DOI :
10.1109/SISPAD.2008.4648238