Title :
THz time-domain spectroscopy study of grating couplers and segmented grating filters
Author :
Garet, F. ; Coutaz, Jean-Louis ; Nazaro, M. ; Bonnet, E. ; Parriaux, O. ; Racine, G.
Author_Institution :
Lab. of Microwaves & Characterization, Savoy Univ., Le Bourget du Lac, France
fDate :
27 Sept.-1 Oct. 2004
Abstract :
THz waves can be used to test devices scaled in the millimeter range before manufacturing micron-sized optical devices. We demonstrate this concept by studying diffraction grating structures by THz time-domain spectroscopy. We show that 1D silicon grid gratings behave as narrow band high reflectivity mirror for focused THz beams.
Keywords :
diffraction gratings; micromirrors; optical couplers; optical waveguide filters; silicon; submillimetre wave spectra; submillimetre waves; time-domain analysis; 1D silicon grid gratings; Si; THz beams; THz time domain spectroscopy; THz waves; diffraction grating structures; grating couplers; micron sized optical devices; narrow band high reflectivity mirror; segmented grating filters; Couplers; Gratings; Manufacturing; Millimeter wave devices; Optical devices; Optical diffraction; Optical filters; Spectroscopy; Testing; Time domain analysis;
Conference_Titel :
Infrared and Millimeter Waves, 2004 and 12th International Conference on Terahertz Electronics, 2004. Conference Digest of the 2004 Joint 29th International Conference on
Print_ISBN :
0-7803-8490-3
DOI :
10.1109/ICIMW.2004.1422014
