DocumentCode :
3054320
Title :
High reliable Al-Si alloy/Si contacts by rapid thermal sintering
Author :
Uemura, E. ; Onoda, Hiroshi ; Madokoro, S.
Author_Institution :
Oki Electric Industry Co., Ltd.
fYear :
1988
fDate :
12-14 Apr 1988
Firstpage :
39
Lastpage :
39
Keywords :
Contact resistance; Electrical resistance measurement; Furnaces; Heat treatment; Metallization; Rapid thermal annealing; Rapid thermal processing; Research and development; Silicon alloys; Very large scale integration;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Reliability Physics Symposium 1988. 26th Annual Proceedings., International
Type :
conf
DOI :
10.1109/RELPHY.1988.917817
Filename :
917817
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3054320
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