Reliability measurement of single axis capacitive accelerometers employing mechanical, thermal and acoustic stresses

Author

Zaiyadi, Nazman ; -Yasin, Faisal Mohd ; Nagel, David J. ; Korman, Can E.

Author_Institution

Fac. of Eng., Multimedia Univ., Cyberjaya, Malaysia

fYear

2009

fDate

9-11 Dec. 2009

Firstpage

1

Lastpage

2

Abstract

The purpose of this paper is to employ the QALT procedure on single axis accelerometers from Analog Device and Freescale. Laser-precision apparatus was designed, built, and employed to provide three types of excitations with great accuracy; mechanical (gravitational) test, thermal test and acoustical test. These tests are designed to mimic the operating conditions of the system, where the devices are employed.

Keywords

accelerometers; microsensors; reliability; QALT procedure; acoustic stress; acoustical test; gravitational test; laser-precision apparatus; mechanical stress; reliability measurement; single axis accelerometers; single axis capacitive accelerometers; thermal stress; thermal test; Accelerometers; Acoustic devices; Acoustic measurements; Acoustic testing; Laser excitation; Mechanical variables measurement; Optical design; Stress measurement; System testing; Thermal stresses;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Device Research Symposium, 2009. ISDRS '09. International

Conference_Location

College Park, MD

Print_ISBN

978-1-4244-6030-4

Electronic_ISBN

978-1-4244-6031-1

Type

conf

DOI

10.1109/ISDRS.2009.5378027

Filename

5378027