Inertial MEMS Test Challenges

This paper describes the challenges in Inertial Micro-Electro Mechanical System (MEMS) testing as compared to standard Application Specific Integrated Circuit (ASIC) testing. The most significant challenge in MEMS testing is having moving silicon parts surrounded by integrated circuitry (IC). Testing integrated circuits, whether analog or digital has its own complexity. However MEMS testing need to be more refined and accurate due to their criticality in applications like automobile airbag trigger, activate skid control, health care, etc. In addition to electrical testing MEMS also requires mechanical testing (Sensitivity) which is an important test parameter to characterize the device and market it with guarantee.