Title :
Nine-Element Lumped Metal-Insulator-Metal (MIM) Capacitor Model for RF Applications
Author :
Subramaniam, Kalavathi ; Kordesch, Albert Victor ; Esa, Mazlina
Author_Institution :
Univ. of Technol., Skudai
Abstract :
In this paper we suggest using a nine element model to represent metal-insulator-metal (MIM) capacitors up to 20 GHz. The model suggested is a nine element pi circuit that includes interconnect resistance and inductance as well as substrate parasitics. This paper also identifies the procedures to extract the nine element lumped MIM capacitor model and to optimize the model to fit the measured data up to the self resonant frequency. A good fit between the modeled and measured effective capacitance and Q factor have been obtained in this work.
Keywords :
MIM devices; Q-factor; capacitors; Q factor; RF applications; effective capacitance; interconnect inductance; interconnect resistance; nine element pi circuit; nine-element lumped metal-insulator-metal capacitor model; substrate parasitics; Data mining; Electrical resistance measurement; Frequency measurement; Inductance; Integrated circuit interconnections; MIM capacitors; Metal-insulator structures; Radio frequency; Radiofrequency identification; Resonant frequency;
Conference_Titel :
Electronics Manufacturing and Technology, 31st International Conference on
Conference_Location :
Petaling Jaya
Print_ISBN :
978-1-4244-0730-9
Electronic_ISBN :
1089-8190
DOI :
10.1109/IEMT.2006.4456489
