DocumentCode
3054681
Title
Monolithic integration of microelectric components and microfluidic structures in glass using femtosecond laser
Author
Jian Xu ; Dong Wu ; Sizhu Wu ; Sugioka, K. ; Midorikawa, Katsumi
Author_Institution
Laser Technol. Lab., RIKEN, Wako, Japan
fYear
2013
fDate
June 30 2013-July 4 2013
Firstpage
1
Lastpage
2
Abstract
Microelectric components and microfluidic structures are monolithically integrated in a glass substrate by a femtosecond laser. The fabricated microchips are used as microheaters to control the temperature of in-channel fluids.
Keywords
electric heating; laser beam machining; microfluidics; micromachining; femtosecond laser; glass substrate; inchannel fluid; microchip fabrication; microelectric components; microfluidic structure; microheaters; monolithic integration; temperature control; Glass; Laser ablation; Metals; Microfluidics; Surface emitting lasers; Surface treatment; Ultrafast optics;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2013 Conference on
Conference_Location
Kyoto
Type
conf
DOI
10.1109/CLEOPR.2013.6600019
Filename
6600019
Link To Document