Title :
Monolithic integration of microelectric components and microfluidic structures in glass using femtosecond laser
Author :
Jian Xu ; Dong Wu ; Sizhu Wu ; Sugioka, K. ; Midorikawa, Katsumi
Author_Institution :
Laser Technol. Lab., RIKEN, Wako, Japan
fDate :
June 30 2013-July 4 2013
Abstract :
Microelectric components and microfluidic structures are monolithically integrated in a glass substrate by a femtosecond laser. The fabricated microchips are used as microheaters to control the temperature of in-channel fluids.
Keywords :
electric heating; laser beam machining; microfluidics; micromachining; femtosecond laser; glass substrate; inchannel fluid; microchip fabrication; microelectric components; microfluidic structure; microheaters; monolithic integration; temperature control; Glass; Laser ablation; Metals; Microfluidics; Surface emitting lasers; Surface treatment; Ultrafast optics;
Conference_Titel :
Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2013 Conference on
Conference_Location :
Kyoto
DOI :
10.1109/CLEOPR.2013.6600019
