Author :
Zengerle, R. ; Sandmaier, H.
Author_Institution :
Inst. fur Mikro- und Informationstechnik, Villingen-Schwenningen, Germany
Abstract :
According to a market study of the year 1994, there were expected significant market shares for miniaturized devices for fluid regulation and control. Now, two years are gone and we try to review in our paper the major improvements and the trends during the last two years. Because of this, the paper can be seen as a supplement of previous reviews with recent developments. If it is possible, latest developments in conventional technology are compared with MEMS-technology
Keywords :
flow control; fluidic devices; micromechanical devices; pumps; valves; MEMS-technology; fluid control; fluid regulation; microfluidics; miniaturized devices; Commercialization; Control systems; Energy consumption; Gases; Manufacturing; Medical control systems; Microfluidics; Microvalves; Optical sensors; Valves;
Conference_Titel :
Micro Machine and Human Science, 1996., Proceedings of the Seventh International Symposium
Conference_Location :
Nagoya
Print_ISBN :
0-7803-3596-1
DOI :
10.1109/MHS.1996.563395
