Empirical validation of thermal dynamics in a silicon microthruster: influence of boundary conditions

Author

Salleras, M. ; García, I. ; Palacin, J. ; Puig, M. ; Samitier, J. ; Marco, S.

Author_Institution

Departament d´´Electronica, Barcelona Univ., Spain

fYear

2004

fDate

2004

Firstpage

93

Lastpage

100

Abstract

This paper investigates the influence of boundary conditions on the validation of a dynamic compact thermal model. The applied boundary conditions are used to consider the effect of the non-modelled parts of the microthruster. The values obtained through different optimization processes show the presence of local minima. This effect is overcome through a design of experiments, based on a central composite design. With the response surface fitted to the model error surface, a Monte-Carlo simulation is made, in order to obtain statistical information on the input parameters. Finally, the influence of the selected input parameters on the evolution of some relevant nodes is plotted. The thermal dynamics of these nodes, is to be predicted with a dynamic multiport compact thermal model.

Keywords

Monte Carlo methods; boundary-value problems; design of experiments; finite element analysis; microactuators; optimisation; response surface methodology; thermal analysis; FEM model; Monte-Carlo simulation; Si; design of experiments; dynamic multiport compact thermal model; microactuators; model error surface; optimization; response surface fitting; silicon microthruster thermal dynamics; thermal dynamics boundary conditions; Boundary conditions; Finite element methods; Material properties; Predictive models; Response surface methodology; Sampling methods; Scattering parameters; Silicon; Solid modeling; Uncertainty;

fLanguage

English

Publisher

ieee

Conference_Titel

Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems, 2004. EuroSimE 2004. Proceedings of the 5th International Conference on

Print_ISBN

0-7803-8420-2

Type

conf

DOI

10.1109/ESIME.2004.1304027

Filename

1304027