Model order reduction of 3D electro-thermal model for a novel micromachined hotplate gas sensor

Author

Bechtold, Tamara ; Hildenbrand, Jurgen ; Wöllenstein, Jürgen ; Korvink, Jan G.

Author_Institution

IMTEK, Freiburg Univ., Germany

fYear

2004

fDate

2004

Firstpage

263

Lastpage

267

Abstract

In this paper we present an automatic, Arnoldi-based model order reduction of a 3D electro-thermal model for a novel sensor device. Model order reduction is essential for achieving a quickly evaluable, yet still accurate, macromodel of the device, needed for system-level simulation. We present below numerical simulation results of the full-scale finite element model and the compact-reduced order model, and show how the nonlinearities in the input function can be treated even with the linear reduction algorithm.

Keywords

finite element analysis; gas sensors; microsensors; nonlinear network analysis; reduced order systems; thermal management (packaging); 3D electro-thermal model; Arnoldi-based model order reduction; compact-reduced order model; device macromodel; full-scale finite element model; input function nonlinearity reduction algorithm; microhotplate gas sensor array; micromachined hotplate gas sensor; thermal management; Finite element methods; Gas detectors; Glass; Heating; Numerical simulation; Power system modeling; Sensor arrays; Silicon; Thermal conductivity; Thermal management;

fLanguage

English

Publisher

ieee

Conference_Titel

Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems, 2004. EuroSimE 2004. Proceedings of the 5th International Conference on

Print_ISBN

0-7803-8420-2

Type

conf

DOI

10.1109/ESIME.2004.1304049

Filename

1304049