• DocumentCode
    3055905
  • Title

    Novel 2D micronib ionization sources for nano electrospray-mass spectrometry (ESI-MS)

  • Author

    Le Gac, Séverine ; Rolando, Christian ; Arscott, Steve

  • Author_Institution
    UPRESA CNRS 8009, Univ. des Sci. et Technol. de Lille, Villeneuve d´´Ascq, France
  • fYear
    2004
  • fDate
    2004
  • Firstpage
    305
  • Lastpage
    309
  • Abstract
    We present here novel 2D ´nib-like´ interfaces for nano-electro spray mass spectrometry (nanoESI-MS) applications. The design, fabrication and testing of three generations of such sources are outlined. The two first generations of nibs were fabricated using a negative photoresist (SU-8); they consisted of prototypes which allowed us to validate the idea of a nanoESI nib tip. They had respectively 20×30 μm and 8-16×35 μm section dimensions at their outlet. First generation nibs were seen not to have appropriate dimensions for nanoESI applications. Testing of the second generation demonstrated the influence of outlet orifice dimensions on the ionization process and on the electrospray performance. A third generation of micro-nibs was fabricated using polycrystalline silicon (poly-Si) and silicon-based surface micromachining techniques. These latter were highly planar and had much smaller tip dimensions of approximately 2×2 μm. MS testing on an ion trap mass spectrometer, with standard peptides initially, and then samples of various natures, showed the feasibility of the ´nib-like´ approach and the subsequent improvements obtained as the design and fabrication of the interfaces evolved.
  • Keywords
    elemental semiconductors; mass spectrometer accessories; mass spectrometers; microfluidics; micromachining; silicon; 2 micron; 20 micron; 2D micronib ionization sources; 30 micron; 35 micron; 8 to 16 micron; SU-8; Si; capillary slot; ion trap mass spectrometer; microfabricated emitter tips; nano electrospray-mass spectrometry; nanoESI-MS; negative photoresist; nib tip outlet orifice dimensions; nib-like interfaces; peptides; poly-Si; polycrystalline silicon; surface micromachining; Fabrication; Ionization; Mass spectroscopy; Micromachining; Orifices; Prototypes; Resists; Silicon; Spraying; Testing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems, 2004. EuroSimE 2004. Proceedings of the 5th International Conference on
  • Print_ISBN
    0-7803-8420-2
  • Type

    conf

  • DOI
    10.1109/ESIME.2004.1304055
  • Filename
    1304055