Title :
Cantilever microbeams : modelling of the dynamical behaviour and material characterization
Author :
Yahiaoui, Réda ; Bosseboeuf, Alain
Author_Institution :
Inst. d´´Electronique Fondamentale, Univ. de Paris XI, Orsay, France
Abstract :
This paper is subdivided into two parts: modelling of cantilever microbeams with finite element analysis software (ANSYS); and material characterisation with an experimental set-up designed for the vibration spectra measurements of micromechanical devices and micro(opto)electromechanical systems (M(O)EMS).
Keywords :
Young´s modulus; finite element analysis; micromechanical devices; resonance; vibrations; MEMS; MOEMS; Young´s modulus; cantilever microbeam modelling; finite element analysis; material characterisation; microelectromechanical systems; micromechanical devices; microoptoelectromechanical systems; resonance; vibration spectra measurements; Chromium; Finite element methods; Frequency measurement; Geometry; Micromechanical devices; Performance analysis; Resonant frequency; Signal processing; Vibration measurement; Visualization;
Conference_Titel :
Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems, 2004. EuroSimE 2004. Proceedings of the 5th International Conference on
Print_ISBN :
0-7803-8420-2
DOI :
10.1109/ESIME.2004.1304067
