Title :
Surface-independent structure characterization using fuzzy logic
Author :
Al-Mousa, Amjed ; Niemann, Darrell L. ; Niemann, Devin J. ; Gunther, Norman G. ; Rahman, Mahmud
Author_Institution :
Electr. Eng. Dept., Santa Clara Univ., Santa Clara, CA, USA
Abstract :
In this paper a fuzzy logic based analysis technique capable of automatically characterizing significantly different types of surfaces, regardless of their degree of crowdedness was presented. The technique employs an enhanced search-and-associate mechanism that resolves even intricate structure boundaries.The performance of the technique for specific experimental test structures was also analyzed.
Keywords :
fuzzy logic; physics computing; surface structure; automatic characterization; crowded surfaces; fuzzy input membership functions; fuzzy logic; search-and-associate mechanism; sparse surfaces; structure boundaries; surface topology; surface-independent structure characterization; Atomic force microscopy; Character recognition; Educational institutions; Fuzzy logic; Nanostructures; Performance analysis; Rough surfaces; Scanning probe microscopy; Surface roughness; Testing;
Conference_Titel :
Semiconductor Device Research Symposium, 2009. ISDRS '09. International
Conference_Location :
College Park, MD
Print_ISBN :
978-1-4244-6030-4
Electronic_ISBN :
978-1-4244-6031-1
DOI :
10.1109/ISDRS.2009.5378122
