A micromachined rotating gyroscope

This paper describes some first results of a novel, electromagnetically levitated, micromachined gyroscope. The first prototype rotates at just over 1,000 revolutions per minute (rpm), with a predicted resolution of approximately 0.5 degrees per second per root-hertz. The finite element model developed for the gyroscope, indicates that this rotation speed may be increased by orders of magnitude, with corresponding increases in the sensitivity. Practical limitations of the electromagnetic design (bearing stiffness) indicate that the maximum working speed is of the order of 100,000 rpm. At this speed, the predicted resolution is 0.005 degrees per second per root-hertz. The device also has the advantage that it is extremely simple to fabricate, has high reliability and low drift