• DocumentCode
    305656
  • Title

    An on-line scheduler for semiconductor fabrications

  • Author

    Ran, Wang ; Cheng, Wu

  • Author_Institution
    Dept. of Autom., Tsinghua Univ., Beijing, China
  • Volume
    1
  • fYear
    1996
  • fDate
    14-17 Oct 1996
  • Firstpage
    238
  • Abstract
    As is well known, semiconductor fabrication is very complex. The complexity is caused by the competitive use of the same machines by the same types of products at their different stages of manufacturing life and random rework and scrapped. It is a hard problem in fab management. In this paper, we use an on-line scheduler to give a practical schedule that can respond to “burst” states of the fab and give good performances. The simulation results of an aggregated model show that this method is effective
  • Keywords
    expert systems; integrated circuit manufacture; production control; burst states; fab management; online scheduler; semiconductor fabrications; Automation; Costs; Electric breakdown; Expert systems; Fabrication; Job shop scheduling; Manufacturing industries; Manufacturing processes; Radio access networks; Semiconductor device modeling;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Systems, Man, and Cybernetics, 1996., IEEE International Conference on
  • Conference_Location
    Beijing
  • ISSN
    1062-922X
  • Print_ISBN
    0-7803-3280-6
  • Type

    conf

  • DOI
    10.1109/ICSMC.1996.569773
  • Filename
    569773