Title :
An on-line scheduler for semiconductor fabrications
Author :
Ran, Wang ; Cheng, Wu
Author_Institution :
Dept. of Autom., Tsinghua Univ., Beijing, China
Abstract :
As is well known, semiconductor fabrication is very complex. The complexity is caused by the competitive use of the same machines by the same types of products at their different stages of manufacturing life and random rework and scrapped. It is a hard problem in fab management. In this paper, we use an on-line scheduler to give a practical schedule that can respond to “burst” states of the fab and give good performances. The simulation results of an aggregated model show that this method is effective
Keywords :
expert systems; integrated circuit manufacture; production control; burst states; fab management; online scheduler; semiconductor fabrications; Automation; Costs; Electric breakdown; Expert systems; Fabrication; Job shop scheduling; Manufacturing industries; Manufacturing processes; Radio access networks; Semiconductor device modeling;
Conference_Titel :
Systems, Man, and Cybernetics, 1996., IEEE International Conference on
Conference_Location :
Beijing
Print_ISBN :
0-7803-3280-6
DOI :
10.1109/ICSMC.1996.569773