DocumentCode
305656
Title
An on-line scheduler for semiconductor fabrications
Author
Ran, Wang ; Cheng, Wu
Author_Institution
Dept. of Autom., Tsinghua Univ., Beijing, China
Volume
1
fYear
1996
fDate
14-17 Oct 1996
Firstpage
238
Abstract
As is well known, semiconductor fabrication is very complex. The complexity is caused by the competitive use of the same machines by the same types of products at their different stages of manufacturing life and random rework and scrapped. It is a hard problem in fab management. In this paper, we use an on-line scheduler to give a practical schedule that can respond to “burst” states of the fab and give good performances. The simulation results of an aggregated model show that this method is effective
Keywords
expert systems; integrated circuit manufacture; production control; burst states; fab management; online scheduler; semiconductor fabrications; Automation; Costs; Electric breakdown; Expert systems; Fabrication; Job shop scheduling; Manufacturing industries; Manufacturing processes; Radio access networks; Semiconductor device modeling;
fLanguage
English
Publisher
ieee
Conference_Titel
Systems, Man, and Cybernetics, 1996., IEEE International Conference on
Conference_Location
Beijing
ISSN
1062-922X
Print_ISBN
0-7803-3280-6
Type
conf
DOI
10.1109/ICSMC.1996.569773
Filename
569773
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