Title :
On investigation of impurities of tetrafluorosilane by microwave gas spectroscopy method
Author :
Vaks, V.L. ; Chernyaeva, M.B. ; Klyueva, N.V. ; Domracheva, E.G. ; Sennikov, P.G. ; Chuprov, L.A.
Author_Institution :
Inst. of Phys. of Microstructures, Acad. of Sci., Nizhny Novgorod, Russia
fDate :
27 Sept.-1 Oct. 2004
Abstract :
The possibilities of using a microwave gas spectroscopy method for the investigation of impurities of silanes are considered in this paper. The absorption lines of known impurities at 2-mm wavelength range are analyzed. The presence of freons in tetrafluorosilane was experimentally found.
Keywords :
absorption coefficients; impurities; infrared spectra; microwave spectra; organic compounds; 2 mm; absorption lines; freons; impurities; microwave gas spectroscopy method; tetrafluorosilane; Electromagnetic wave absorption; Frequency estimation; Frequency measurement; Impurities; Information analysis; Material properties; Microwave measurements; Microwave theory and techniques; Phase measurement; Spectroscopy;
Conference_Titel :
Infrared and Millimeter Waves, 2004 and 12th International Conference on Terahertz Electronics, 2004. Conference Digest of the 2004 Joint 29th International Conference on
Print_ISBN :
0-7803-8490-3
DOI :
10.1109/ICIMW.2004.1422121
