Signal processing computer system for multi-wavelength imaging pyrometer

Author

Li, Jun ; Hou, Edwin ; Kosonocky, Walter F.

Author_Institution

Dept. of Electr. & Comput. Eng., New Jersey Inst. of Technol., Newark, NJ, USA

Volume

1

fYear

1996

fDate

14-17 Oct 1996

Firstpage

456

Abstract

The development of the multi-wavelength imaging pyrometer (M-WIP) workstation, a signal processing computer system for multi-wavelength imaging pyrometer, is presented in this paper. The M-WIP was developed for non-contact surface temperature profile measurement of distant objects with unknown spectrally varying emissivity. The M-WIP workstation was designed as a general purpose computer system for electronic imaging, and its application targets are real-time thermal process monitoring and feedback control. The performance of the system are illustrated in this paper

Keywords

computer vision; computerised instrumentation; focal planes; infrared imaging; integrated circuit manufacture; process control; pyrometers; rapid thermal processing; real-time systems; signal processing; spectral methods of temperature measurement; temperature control; temperature distribution; computer vision; emissivity; image processing; multiple wavelength imaging pyrometer; noncontact surface temperature profile measurement; rapid thermal process; real-time systems; signal processing computer system; silicon wafer temperature profile; thermal process monitoring; thermographic measurement; workstation; Cameras; Filters; Image processing; Lamps; Real time systems; Signal processing; Sun; Temperature control; Temperature measurement; Workstations;

fLanguage

English

Publisher

ieee

Conference_Titel

Systems, Man, and Cybernetics, 1996., IEEE International Conference on

Conference_Location

Beijing

ISSN

1062-922X

Print_ISBN

0-7803-3280-6

Type

conf

DOI

10.1109/ICSMC.1996.569816

Filename

569816