DocumentCode
3056996
Title
Effect of random surface charge distribution on transport in 4H-SiC MOSFETs
Author
Potbhare, Siddharth ; Goldsman, Neil ; Akturk, Akin ; Lelis, Aivars
Author_Institution
Electr. & Comput. Eng., Univ. of Maryland, College Park, MD, USA
fYear
2009
fDate
9-11 Dec. 2009
Firstpage
1
Lastpage
2
Abstract
The study of random fluctuation of surface charges in 4H-SiC MOSFETs indicates that the surface charge variation gives rise to a shift in threshold voltage of the device. A small change in transconductance is observed when large amount of randomness is considered at the surface. Furthermore, the surface mobility changes significantly along the channel at low gate biases. But at high gate biases, the relative randomness in the surface mobility is greatly reduced leading to almost no change in the transconductance and current at high gate biases in 4H-SiC MOSFETs.
Keywords
MOSFET; carrier mobility; fluctuations; silicon compounds; wide band gap semiconductors; 4H-SiC MOSFET; SiC; low gate biases; random fluctuation; random surface charge distribution; surface mobility; threshold voltage; transconductance; Educational institutions; Fluctuations; MOSFETs; Photonic band gap; Rough surfaces; Scattering; Silicon carbide; Surface roughness; Threshold voltage; Transconductance;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Device Research Symposium, 2009. ISDRS '09. International
Conference_Location
College Park, MD
Print_ISBN
978-1-4244-6030-4
Electronic_ISBN
978-1-4244-6031-1
Type
conf
DOI
10.1109/ISDRS.2009.5378149
Filename
5378149
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