Title :
High performance IGZO TFTs on steel: Device stability and circuit integration
Author :
Khan, Shahrukh A. ; Hatalis, Miltiadis
Author_Institution :
Display Res. Lab., Lehigh Univ., Bethlehem, PA, USA
Abstract :
Oxide-semiconductor based thin-film transistors (TFTs) have advanced tremendously off-late and provides an attractive alternative to silicon-based TFTs. They are usually wide-gap materials, transparent in the visible spectrum and thus render possible ubiquitous transparent electronics. Furthermore, large carrier mobilities in the amorphous phase is achievable due to high degree of localization and suggests that if the carrier concentration can be controlled, the properties of amorphous oxides are quite suitable for TFT applications. In this present study, we present room temperature fabrication and characterization of amorphous IGZO (Indium Gallium Zinc Oxide) based TFTs. Although numerous reports exist about IGZO TFTs, there is few that report high performance device characteristic without the need of post fabrication processes.
Keywords :
carrier mobility; gallium compounds; indium compounds; semiconductor device manufacture; steel; thin film transistors; wide band gap semiconductors; zinc compounds; InGaZnO4; amorphous IGZO based TFT; amorphous oxides; amorphous phase; carrier concentration; carrier mobilities; circuit integration; device stability; oxide-semiconductor based thin-film transistors; room temperature fabrication; steel; ubiquitous transparent electronics; visible spectrum; wide-gap materials; Amorphous materials; Circuit stability; Dielectric substrates; Displays; Educational institutions; Fabrication; Steel; Stress; Temperature; Thin film transistors;
Conference_Titel :
Semiconductor Device Research Symposium, 2009. ISDRS '09. International
Conference_Location :
College Park, MD
Print_ISBN :
978-1-4244-6030-4
Electronic_ISBN :
978-1-4244-6031-1
DOI :
10.1109/ISDRS.2009.5378154