Title :
Flexible temperature sensor array of PDMS-encapsulated conductive CNT thin films fabricated by solution process
Author :
Kwon, Minkyu ; Hong, Yongtaek
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Seoul Nat. Univ., Seoul, South Korea
Abstract :
In conclusion, PDMS-encapsulated CNT thin film shows excellent linear temperature sensitivity on the flexible substrate and each node shows good temperature sensing performance. Moreover, we successfully demonstrated a flexible temperature sensor array by using only solution process which will play a key role in low cost and simple future fabrication process development in flexible electronics.
Keywords :
carbon nanotubes; flexible electronics; sensor arrays; temperature sensors; PDMS-encapsulated conductive CNT thin films; flexible electronics; flexible temperature sensor array; linear temperature sensitivity; Chemical sensors; Conductive films; Electrodes; Sensor arrays; Substrates; Surface resistance; Temperature sensors; Thermal sensors; Thin film sensors; Transistors;
Conference_Titel :
Semiconductor Device Research Symposium, 2009. ISDRS '09. International
Conference_Location :
College Park, MD
Print_ISBN :
978-1-4244-6030-4
Electronic_ISBN :
978-1-4244-6031-1
DOI :
10.1109/ISDRS.2009.5378156
