Title :
Micro field in MEMS actuators
Author :
Cui, T.H. ; Zhou, Z.Y.
Author_Institution :
Dept. of Precision Instrum. & Mechanology, Tsinghua Univ., Beijing, China
Abstract :
Micro field is a new basic concept which can be used to analyze the actuation mechanism of MEMS (Micro Electro Mechanical Systems) actuators. First, the basic concept of micro field and fundamental principle of micro extended Rayleigh wave field have been put forward. Then, the micro field has been used to analyze the intrinsic quality of two kinds of microactuators, which include a piezoelectric micropump and a piezoelectric micromotor as typical examples. Finally, a new kind of piezoelectric micromotor model has been fabricated to carry out experiments
Keywords :
microactuators; micromotors; micropumps; piezoelectric actuators; MEMS actuators; actuation mechanism; micro extended Rayleigh wave field; micro field; microactuators; piezoelectric micromotor; piezoelectric micropump; Actuators; Electrostatics; Instruments; Magnetic fields; Mechanical systems; Microactuators; Micromechanical devices; Micromotors; Micropumps; Stress;
Conference_Titel :
Micro Machine and Human Science, 1996., Proceedings of the Seventh International Symposium
Conference_Location :
Nagoya
Print_ISBN :
0-7803-3596-1
DOI :
10.1109/MHS.1996.563409
