Title :
Localized circuit probing with a combined Schottky diode/scanning force microscope
Author :
van der Weide, D.W. ; Agrawal, V. ; Bork, T. ; Neuzil, P.
Author_Institution :
Dept. of Electr. & Comput. Eng., Delaware Univ., Newark, DE, USA
Abstract :
We present the first scanned probe Schottky diode used as a detector of microwave power. This technique enables direct sensing of local fields without the use of a high frequency receiver, and it can accommodate simultaneous measurement of sample topography, as well. Applications for this probe range from field mapping on planar filters to failure analysis of MMIC´s.
Keywords :
Schottky diodes; atomic force microscopy; microwave detectors; MMIC; Schottky diode; circuit probe; failure analysis; local field mapping; microwave power detector; planar filter; sample topography measurement; scanning force microscope; Antenna measurements; Circuits; Detectors; Frequency; Magnetic field measurement; Microscopy; Probes; Resists; Schottky diodes; Surfaces;
Conference_Titel :
Microwave Symposium Digest, 1998 IEEE MTT-S International
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
0-7803-4471-5
DOI :
10.1109/MWSYM.1998.700622
