DocumentCode :
3058675
Title :
Scattering light from several-ten nanometer defects of an optical diffractive element
Author :
Hakko, Manabu ; Kiire, Tomohiro ; Barada, Daisuke ; Yatagai, Toyohiko ; Hayasaki, Yoshio
Author_Institution :
Center for Opt. Res. & Educ. (CORE), Utsunomiya Univ., Utsunomiya, Japan
fYear :
2013
fDate :
June 30 2013-July 4 2013
Firstpage :
1
Lastpage :
2
Abstract :
Scattering light from several-ten nanometer defects of an optical diffractive element was investigated with a scatterometer. We firstly demonstrated an agreement between the measurements and computer simulations over 107 dynamic range.
Keywords :
diffractive optical elements; light scattering; optical variables measurement; optical diffractive element; scattering light; scatterometer; several-ten nanometer defects; Diffraction; Dynamic range; Measurement by laser beam; Optical filters; Optical scattering; Radar measurements;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2013 Conference on
Conference_Location :
Kyoto
Type :
conf
DOI :
10.1109/CLEOPR.2013.6600197
Filename :
6600197
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3058675
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