Technological development of THz microfluidic microsystems for biological spectroscopy

Author

Mille, V. ; Bourzgui, N.-E. ; Mejdjoub, F. ; Desplanque, L. ; Lampin, J.F. ; Supiot, P. ; Bocquet, B.

Author_Institution

Inst. of Electron., Microelectron. & Nanotechnol., Univ. des Sci. et Technol. de Lille, Villeneuve d´´Ascq, France

fYear

2004

fDate

27 Sept.-1 Oct. 2004

Firstpage

549

Lastpage

550

Abstract

We investigate a possible fabrication of microfluidic MEMS dedicated to the THz spectroscopy in a mixing technology based on silicon substrate coated with a thick layer of polymer. This layer is useful for the microfluidic circulation and the electromagnetic propagation. We use an original deposition process realized by RPECVD (remote plasma enhanced vapor deposition), called also "cold plasma". We obtain layers up to 110 μm without any cracks. We have measured the dielectric characteristics of this new type of polymer up to 220 GHz with a vectorial network analyzer and between 0.1 to 1.2 THz in the time domain with an electro-optic technique. This technology is now ready and allows realizing a mass production compatible with disposable bioMEMS.

Keywords

biosensors; coplanar waveguides; dielectric losses; dielectric thin films; electro-optical devices; microfluidics; microsensors; permittivity; plasma CVD; polymer films; polymerisation; submillimetre wave devices; submillimetre wave spectra; 0.1 to 1.2 THz; 110 micron; 220 GHz; Si; THz microfluidic microsystems; THz spectroscopy; biological spectroscopy; cold plasma; dielectric properties; disposable bioMEMS; electromagnetic propagation; mass production; microfluidic MEMS; microfluidic circulation; mixing technology; polymer; polymers; remote plasma CVD; remote plasma enhanced vapor deposition; silicon substrate; time domain electro-optic technique; vectorial network analyzer; Chemical vapor deposition; Electromagnetic propagation; Fabrication; Microfluidics; Micromechanical devices; Plasma measurements; Plasma properties; Polymer films; Silicon; Spectroscopy;

fLanguage

English

Publisher

ieee

Conference_Titel

Infrared and Millimeter Waves, 2004 and 12th International Conference on Terahertz Electronics, 2004. Conference Digest of the 2004 Joint 29th International Conference on

Print_ISBN

0-7803-8490-3

Type

conf

DOI

10.1109/ICIMW.2004.1422207

Filename

1422207