Electronic and mechanical systems printed onto flexible substrates

Author

Hines, D.R. ; Huang, J. ; Williams, E.D. ; Siwak, Nathan ; Ghodssi, Reza

Author_Institution

Lab. for Phys. Sci., Univ. of Maryland at Coll. Park, Baltimore, MD, USA

fYear

2009

fDate

9-11 Dec. 2009

Firstpage

1

Lastpage

2

Abstract

Printing methodologies that combine capabilities from both nanoimprint lithography (NIL) and transfer printing (TP) have been utilized to fabricate electronic and mechanical device components onto plastic substrates. A wide variety of materials have been utilized in the fabrication of thin-film transistors (TFT) and mechanical resonators.Details of the printing methods and characteristics of the resulting devices will be presented as a function of membrane material, thickness, printing conditions and cavity dimensions.

Keywords

micromechanical resonators; nanolithography; thin film transistors; electronic systems; mechanical resonators; mechanical systems; nanoimprint lithography; printed onto flexible substrates; printing methodologies; thin-film transistors; transfer printing; Dielectric substrates; Educational institutions; Gold; Mechanical systems; Optical films; Optical resonators; Plastics; Printing; Semiconductor films; Thin film transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Device Research Symposium, 2009. ISDRS '09. International

Conference_Location

College Park, MD

Print_ISBN

978-1-4244-6030-4

Electronic_ISBN

978-1-4244-6031-1

Type

conf

DOI

10.1109/ISDRS.2009.5378264

Filename

5378264