• DocumentCode
    3059891
  • Title

    Germanium PIN detector on silicon grown by Sb surfactant-assisted epitaxy

  • Author

    Davidson, Anthony L., III ; Thompson, Phillip E. ; Worchesky, Terrance ; Twigg, Mark E.

  • Author_Institution
    Naval Res. Lab., Washington, DC, USA
  • fYear
    2009
  • fDate
    9-11 Dec. 2009
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    In the current work, Ge PIN diodes were fabricated on Ge VS on Si substrates using Sb surfactant-assisted growth. Previous studies have shown this method minimizes the threading dislocations and results in a smooth surface. A potential concern is the unintentional doping by the Sb surfactant that continues to segregate. In the PIN devices this may be acceptable since the residual doping can be used as the n electrical contacts or used as a technique to electrically isolate the p contact from the substrate.
  • Keywords
    antimony; elemental semiconductors; germanium; p-i-n diodes; semiconductor doping; silicon; Ge; PIN detector; PIN diodes; Sb; Si; electrical contacts; residual doping; surfactant-assisted epitaxy; surfactant-assisted growth; threading dislocations; Buffer layers; Dark current; Detectors; Diodes; Educational institutions; Epitaxial growth; Germanium; Silicon; Substrates; Temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Device Research Symposium, 2009. ISDRS '09. International
  • Conference_Location
    College Park, MD
  • Print_ISBN
    978-1-4244-6030-4
  • Electronic_ISBN
    978-1-4244-6031-1
  • Type

    conf

  • DOI
    10.1109/ISDRS.2009.5378280
  • Filename
    5378280