DocumentCode
3059891
Title
Germanium PIN detector on silicon grown by Sb surfactant-assisted epitaxy
Author
Davidson, Anthony L., III ; Thompson, Phillip E. ; Worchesky, Terrance ; Twigg, Mark E.
Author_Institution
Naval Res. Lab., Washington, DC, USA
fYear
2009
fDate
9-11 Dec. 2009
Firstpage
1
Lastpage
2
Abstract
In the current work, Ge PIN diodes were fabricated on Ge VS on Si substrates using Sb surfactant-assisted growth. Previous studies have shown this method minimizes the threading dislocations and results in a smooth surface. A potential concern is the unintentional doping by the Sb surfactant that continues to segregate. In the PIN devices this may be acceptable since the residual doping can be used as the n electrical contacts or used as a technique to electrically isolate the p contact from the substrate.
Keywords
antimony; elemental semiconductors; germanium; p-i-n diodes; semiconductor doping; silicon; Ge; PIN detector; PIN diodes; Sb; Si; electrical contacts; residual doping; surfactant-assisted epitaxy; surfactant-assisted growth; threading dislocations; Buffer layers; Dark current; Detectors; Diodes; Educational institutions; Epitaxial growth; Germanium; Silicon; Substrates; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Device Research Symposium, 2009. ISDRS '09. International
Conference_Location
College Park, MD
Print_ISBN
978-1-4244-6030-4
Electronic_ISBN
978-1-4244-6031-1
Type
conf
DOI
10.1109/ISDRS.2009.5378280
Filename
5378280
Link To Document