Title :
Development of MEMS electric split-ring resonator arrays as tunable THz filters
Author :
Fusheng Ma ; You Qian ; Yu-Sheng Lin ; Hongwei Liu ; Xinhai Zhang ; Chengkuo Lee
Author_Institution :
Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore
fDate :
June 30 2013-July 4 2013
Abstract :
Structurally reconfigurable metamaterials showing terahertz frequency tunability are presented, which employ deformable microelectromechanical curved cantilevers for tuning the resonance frequency of the electric split-ring resonators. The observed tunability can be applied in tunable metamaterial devices.
Keywords :
cantilevers; micro-optomechanical devices; micromechanical resonators; microwave photonics; optical filters; optical metamaterials; optical resonators; optical tuning; MEMS electric split-ring resonator arrays; deformable microelectromechanical curved cantilevers; resonance frequency tuning; structurally reconfigurable metamaterials; terahertz frequency tunability; tunable THz filters; Arrays; Measurement by laser beam; Metamaterials; Micromechanical devices; Resonant frequency; Structural beams; Time-domain analysis;
Conference_Titel :
Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2013 Conference on
Conference_Location :
Kyoto
DOI :
10.1109/CLEOPR.2013.6600258
