Title :
Over one thousand large-scale array integration of photonic crystal nanolasers
Author :
Watanabe, Toshio ; Abe, H. ; Nishijima, Yosuke ; Baba, Toshihiko
Author_Institution :
Dept. of Electr. & Comput. Eng., Yokohama Nat. Univ., Yokohama, Japan
fDate :
June 30 2013-July 4 2013
Abstract :
We developed a uniform bonding process of GaInAsP photonic crystal slab on silica glass substrate. We fabricated an array of 1089 nanolasers with a 3 μm pitch and confirmed the lasing in all devices.
Keywords :
III-V semiconductors; gallium arsenide; gallium compounds; indium compounds; integrated optics; nanophotonics; optical fabrication; photonic crystals; quantum well lasers; semiconductor laser arrays; GaInAsP; SiO2; large-scale array integration; nanolaser array; photonic crystal nanolasers; photonic crystal slab; silica glass substrate; size 3 mum; uniform bonding process; Arrays; Photonic crystals; Sensors; Silicon compounds; Slabs; Vertical cavity surface emitting lasers;
Conference_Titel :
Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2013 Conference on
Conference_Location :
Kyoto
DOI :
10.1109/CLEOPR.2013.6600277
