• DocumentCode
    3060572
  • Title

    On the accuracy of current TCAD hot carrier injection models for the simulation of degradation phenomena in nanoscale devices

  • Author

    Zaka, A. ; Rafhay, Q. ; Palestri, P. ; Clerc, R. ; Rideau, D. ; Selmi, L. ; Tavernier, C. ; Jaouen, H.

  • Author_Institution
    STMicroelectronics, Crolles, France
  • fYear
    2009
  • fDate
    9-11 Dec. 2009
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    The aim of this paper is to assess the capability of TCAD tools to accurately model hot electron injection in advanced device architecture versus state of the art full band Monte Carlo.
  • Keywords
    Monte Carlo methods; charge injection; hot carriers; random-access storage; technology CAD (electronics); Monte Carlo method; hot carrier injection models; hot electron injection; nanoscale devices; nonvolatile storage; technology CAD; Analytical models; Context modeling; Degradation; Distribution functions; Hot carrier injection; Monte Carlo methods; Nanoscale devices; Nonuniform electric fields; Predictive models; Secondary generated hot electron injection;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Device Research Symposium, 2009. ISDRS '09. International
  • Conference_Location
    College Park, MD
  • Print_ISBN
    978-1-4244-6030-4
  • Electronic_ISBN
    978-1-4244-6031-1
  • Type

    conf

  • DOI
    10.1109/ISDRS.2009.5378310
  • Filename
    5378310