DocumentCode
3060670
Title
Micromechanical electrostatic K-band switches
Author
Pacheco, S. ; Nguyen, C.T. ; Katehi, L.P.B.
Author_Institution
Radiat. Lab., Michigan Univ., Ann Arbor, MI, USA
Volume
3
fYear
1998
fDate
7-12 June 1998
Firstpage
1569
Abstract
Two novel designs of micromechanical capacitive switches using serpentine and cantilever springs for low actuation voltage applications are reported. Both designs also incorporate an electrode situated above the switching structure in order to provide system stability. DC measurements indicate pull-in voltages of 14 and 16 V, with RF isolation of better than -30 dB up to 40 GHz.
Keywords
electrostatic devices; micromechanical devices; microwave devices; switches; 14 V; 16 V; 40 GHz; DC measurement; RF isolation; actuation voltage; cantilever spring; capacitive switch; electrode; micromechanical electrostatic K-band switch; pull-in voltage; serpentine spring; stability; Electrodes; Electrostatics; Fabrication; K-band; Low voltage; Micromechanical devices; Radio frequency; Springs; Structural beams; Switches;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Symposium Digest, 1998 IEEE MTT-S International
Conference_Location
Baltimore, MD, USA
ISSN
0149-645X
Print_ISBN
0-7803-4471-5
Type
conf
DOI
10.1109/MWSYM.1998.700675
Filename
700675
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