Start-up response improvement for a MEMS inclinometer

Author

Vagner, Martin ; Benes, Petr

Author_Institution

Centre for Res. & Utilization of Renewable Energy, Brno Univ. of Technol., Brno, Czech Republic

fYear

2015

fDate

11-14 May 2015

Firstpage

1363

Lastpage

1366

Abstract

A MEMS inclinometer SCA830 manufactured by Murata was used in a battery-powered handheld instrument designed for measurement of parallelism during fabrication of coil springs. The inclinometer offers a power down mode to reduce power consumption by stopping the internal clocks and resetting the control registers of the device. The power reduction is very significant; however, a transient response was observed in output data. This article describes a compensation technique to suppress this effect, and therefore significantly reduce the startup time. In this case, the model allowed to reduce the start-up time ten times.

Keywords

angular measurement; coils; compensation; microfabrication; microsensors; MEMS inclinometer SCA830; Murata; battery-powered handheld instrument; coil spring; compensation technique; control register; microfabrication; power consumption; start-up response improvement; transient response; Accelerometers; Calibration; Instruments; Mathematical model; Micromechanical devices; Temperature measurement; Temperature sensors; MEMS; accelerometer; inclinometer; measurement; model; start-up; tilt sensor; transient response;

fLanguage

English

Publisher

ieee

Conference_Titel

Instrumentation and Measurement Technology Conference (I2MTC), 2015 IEEE International

Conference_Location

Pisa

Type

conf

DOI

10.1109/I2MTC.2015.7151472

Filename

7151472