Title :
Nanoindentation hardness and elastic modulus of AlGaN alloys
Author :
Tokumoto, Yuki ; Taneichi, H. ; Ohno, Y. ; Kutsukake, Kentaro ; Miyake, Hirokazu ; Hiramatsu, Kaoru ; Yonenaga, Ichiro
Author_Institution :
Inst. for Mater. Res., Tohoku Univ., Sendai, Japan
fDate :
June 30 2013-July 4 2013
Abstract :
Nanoindentation hardness tests were conducted on various AlxGa1-xN alloys grown by metal-organic vapor-phase epitaxy. AlGaN alloys showed the hardness of 16.5-19.5 GPa strongly dependent on the alloy composition with a maximum at x~0.5, while the Young´s modulus was ~ 300GPa, almost constant in the whole composition range investigated. The observed alloy hardening was confirmed under considering the effects of residual in-plane strain and threading dislocation densities.
Keywords :
MOCVD; Young´s modulus; aluminium compounds; hardness testing; nanoindentation; nanophotonics; AlxGa1-xN; Young modulus; alloy composition; alloy hardening; elastic modulus; metal-organic vapor-phase epitaxy; nanoindentation hardness tests; residual in-plane strain; threading dislocation densities; Aluminum gallium nitride; Epitaxial growth; III-V semiconductor materials; Strain; Young´s modulus;
Conference_Titel :
Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2013 Conference on
Conference_Location :
Kyoto
DOI :
10.1109/CLEOPR.2013.6600379
