• DocumentCode
    3062897
  • Title

    Nanoindentation hardness and elastic modulus of AlGaN alloys

  • Author

    Tokumoto, Yuki ; Taneichi, H. ; Ohno, Y. ; Kutsukake, Kentaro ; Miyake, Hirokazu ; Hiramatsu, Kaoru ; Yonenaga, Ichiro

  • Author_Institution
    Inst. for Mater. Res., Tohoku Univ., Sendai, Japan
  • fYear
    2013
  • fDate
    June 30 2013-July 4 2013
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Nanoindentation hardness tests were conducted on various AlxGa1-xN alloys grown by metal-organic vapor-phase epitaxy. AlGaN alloys showed the hardness of 16.5-19.5 GPa strongly dependent on the alloy composition with a maximum at x~0.5, while the Young´s modulus was ~ 300GPa, almost constant in the whole composition range investigated. The observed alloy hardening was confirmed under considering the effects of residual in-plane strain and threading dislocation densities.
  • Keywords
    MOCVD; Young´s modulus; aluminium compounds; hardness testing; nanoindentation; nanophotonics; AlxGa1-xN; Young modulus; alloy composition; alloy hardening; elastic modulus; metal-organic vapor-phase epitaxy; nanoindentation hardness tests; residual in-plane strain; threading dislocation densities; Aluminum gallium nitride; Epitaxial growth; III-V semiconductor materials; Strain; Young´s modulus;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2013 Conference on
  • Conference_Location
    Kyoto
  • Type

    conf

  • DOI
    10.1109/CLEOPR.2013.6600379
  • Filename
    6600379
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3062897