Title :
An actuation system for parallel link micromanipulators
Author :
Kallio, Pasi ; Lind, Mikael ; Kojola, Hannu ; Zhou, Quan ; Koivo, Heikki N.
Author_Institution :
Autom. & Control Inst., Tampere Univ. of Technol., Finland
Abstract :
This paper describes a new miniaturized actuation system designed especially for parallel link micromanipulators; the system is mechanically designed to form a very compact structure when used in parallel configuration. It consists of a monolithic unimorph type of piezoelectric actuator, an electro-deposited bellows, a tank and hydraulic fluid. The displacement of the piezoelectric element is hydraulically magnified and converted to the displacement of the bellows. The piezohydraulic actuator provides movement from a micrometer level up to a maximum displacement of 500 μm
Keywords :
electrohydraulic control equipment; manipulators; microactuators; piezoelectric actuators; 500 mum; actuation system; electrodeposited bellows; hydraulic fluid; monolithic unimorph piezoelectric actuator; parallel link micromanipulators; piezohydraulic actuator; Assembly; Automation; Bellows; Capacitive sensors; DC motors; Electrostatic actuators; Hydraulic actuators; Micromanipulators; Piezoelectric actuators; Shape memory alloys;
Conference_Titel :
Intelligent Robots and Systems '96, IROS 96, Proceedings of the 1996 IEEE/RSJ International Conference on
Conference_Location :
Osaka
Print_ISBN :
0-7803-3213-X
DOI :
10.1109/IROS.1996.571064