An actuation system for parallel link micromanipulators

Author

Kallio, Pasi ; Lind, Mikael ; Kojola, Hannu ; Zhou, Quan ; Koivo, Heikki N.

Author_Institution

Autom. & Control Inst., Tampere Univ. of Technol., Finland

Volume

2

fYear

1996

fDate

4-8 Nov 1996

Firstpage

856

Abstract

This paper describes a new miniaturized actuation system designed especially for parallel link micromanipulators; the system is mechanically designed to form a very compact structure when used in parallel configuration. It consists of a monolithic unimorph type of piezoelectric actuator, an electro-deposited bellows, a tank and hydraulic fluid. The displacement of the piezoelectric element is hydraulically magnified and converted to the displacement of the bellows. The piezohydraulic actuator provides movement from a micrometer level up to a maximum displacement of 500 μm

Keywords

electrohydraulic control equipment; manipulators; microactuators; piezoelectric actuators; 500 mum; actuation system; electrodeposited bellows; hydraulic fluid; monolithic unimorph piezoelectric actuator; parallel link micromanipulators; piezohydraulic actuator; Assembly; Automation; Bellows; Capacitive sensors; DC motors; Electrostatic actuators; Hydraulic actuators; Micromanipulators; Piezoelectric actuators; Shape memory alloys;

fLanguage

English

Publisher

ieee

Conference_Titel

Intelligent Robots and Systems '96, IROS 96, Proceedings of the 1996 IEEE/RSJ International Conference on

Conference_Location

Osaka

Print_ISBN

0-7803-3213-X

Type

conf

DOI

10.1109/IROS.1996.571064

Filename

571064