An actuation system for parallel link micromanipulators

This paper describes a new miniaturized actuation system designed especially for parallel link micromanipulators; the system is mechanically designed to form a very compact structure when used in parallel configuration. It consists of a monolithic unimorph type of piezoelectric actuator, an electro-deposited bellows, a tank and hydraulic fluid. The displacement of the piezoelectric element is hydraulically magnified and converted to the displacement of the bellows. The piezohydraulic actuator provides movement from a micrometer level up to a maximum displacement of 500 μm