DocumentCode :
306354
Title :
Two-dimensional conveyance system using cooperative motions of many microactuators
Author :
Konishi, Satoshi ; Fujita, Hiroyuki
Author_Institution :
Inst. of Ind. Sci., Tokyo Univ., Japan
Volume :
2
fYear :
1996
fDate :
4-8 Nov 1996
Firstpage :
988
Abstract :
We have proposed the concept of distributed micro motion systems (DMMS) in order to coordinate simple motions of many microactuators arranged on a wafer so as to perform a more complicated task. A two-dimensional conveyance system in a plane is studied as an example of DMMS. A system design has been presented with the aim of controlling many microactuators in a similar way as the cellular automaton. In this paper, we focus on a microactuator and define a micro-axel as an elemental unit of DMMS. We have previously reported the development and operation of a one-dimensional conveyance system using a fluidic micro-axel array. We improved the conveyance system and developed a two-dimensional system to perform a positioning task. This paper describes the design, fabrication, and operation of a fluidic micro-axel array for the two-dimensional conveyance system. The experiments to convey objects to the fixed desired position by the fabricated two-dimensional conveyance system performed successfully
Keywords :
cooperative systems; materials handling; microactuators; pneumatic control equipment; position control; valves; cellular automaton; cooperative motions; distributed micro motion systems; fluidic micro-axel array; micro-axel; microactuators; positioning task; two-dimensional conveyance system; Circuits; Control systems; Fabrication; Fluidic microsystems; Intelligent sensors; Microactuators; Microfluidics; Micromachining; Micromechanical devices; Servomechanisms;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Intelligent Robots and Systems '96, IROS 96, Proceedings of the 1996 IEEE/RSJ International Conference on
Conference_Location :
Osaka
Print_ISBN :
0-7803-3213-X
Type :
conf
DOI :
10.1109/IROS.1996.571087
Filename :
571087
Link To Document :
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